Composition dependence of room temperature 1.5 mu m Er3+ luminescence from erbium doped silicon : oxygen thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition
- Publisher
- MRS
- Issue Date
- 1997-12-01
- Language
- English
- Citation
Proceedings of the 1997 MRS Symposium, pp.275 - 280
- ISSN
- 0272-9172
- Appears in Collection
- NT-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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