UV submicron lithography 를 위한 4반사광학계의 설계 및 수차해석Design and analysis of the four mirror optical system for UV submicron lithography
- Advisors
- 이상수; Lee, Sang-Soo
- Description
- 한국과학기술원 : 물리학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1991
- Identifier
- 61842/325007 / 000865147
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 물리학과, 1991.2, [ iii, 86 p. ]
- Appears in Collection
- PH-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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