UV submicron lithography 를 위한 4반사광학계의 설계 및 수차해석Design and analysis of the four mirror optical system for UV submicron lithography
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이상수 | - |
| dc.contributor.advisor | Lee, Sang-Soo | - |
| dc.contributor.author | 박성찬 | - |
| dc.contributor.author | Park, Sung-Chan | - |
| dc.date.accessioned | 2011-12-14T07:31:36Z | - |
| dc.date.available | 2011-12-14T07:31:36Z | - |
| dc.date.issued | 1991 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=61842&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/47829 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 물리학과, 1991.2, [ iii, 86 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | UV submicron lithography 를 위한 4반사광학계의 설계 및 수차해석 | - |
| dc.title.alternative | Design and analysis of the four mirror optical system for UV submicron lithography | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 61842/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000865147 | - |
| dc.contributor.localauthor | 박성찬 | - |
| dc.contributor.localauthor | Park, Sung-Chan | - |
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- PH-Theses_Ph.D.(박사논문)
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