불소이온 주입된 규소의 라만 산란 연구와 보론 확산에 미치는 불소의 영향연구 = Raman scattering from $F^+$ implanted Si and fluorine influence on boron diffusion

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 503
  • Download : 0
Advisors
김종진Kim, Jong-Jean
Description
한국과학기술원 : 물리학과,
Publisher
한국과학기술원
Issue Date
1997
Identifier
128497/325007 / 000935154
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 물리학과, 1997.8, [ vi, 83 p. ]

Keywords

확산; 불소; 규소; 라만산란; 점결함; Point defect; Diffusion; Flourine; Raman scattering; Si

URI
http://hdl.handle.net/10203/47572
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=128497&flag=dissertation
Appears in Collection
PH-Theses_Ph.D.(박사논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0