불소이온 주입된 규소의 라만 산란 연구와 보론 확산에 미치는 불소의 영향연구Raman scattering from $F^+$ implanted Si and fluorine influence on boron diffusion
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김종진 | - |
| dc.contributor.advisor | Kim, Jong-Jean | - |
| dc.contributor.author | 박용직 | - |
| dc.contributor.author | Park, Yong-Jik | - |
| dc.date.accessioned | 2011-12-14T07:27:29Z | - |
| dc.date.available | 2011-12-14T07:27:29Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=128497&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/47572 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 물리학과, 1997.8, [ vi, 83 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 확산 | - |
| dc.subject | 불소 | - |
| dc.subject | 규소 | - |
| dc.subject | 라만산란 | - |
| dc.subject | 점결함 | - |
| dc.subject | Point defect | - |
| dc.subject | Diffusion | - |
| dc.subject | Flourine | - |
| dc.subject | Raman scattering | - |
| dc.subject | Si | - |
| dc.title | 불소이온 주입된 규소의 라만 산란 연구와 보론 확산에 미치는 불소의 영향연구 | - |
| dc.title.alternative | Raman scattering from $F^+$ implanted Si and fluorine influence on boron diffusion | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 128497/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000935154 | - |
| dc.contributor.localauthor | 박용직 | - |
| dc.contributor.localauthor | Park, Yong-Jik | - |
- Appears in Collection
- PH-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.