ECR PECVD (Electron cyclotron resonance plasma enhanced chemical vapour deposition)로 증착한 비정질과 미세결정 실리콘의 특성연구 = Properties of amorphous silicon and microcrystalline silicon deposited by ECR PECVD

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Advisors
신성철researcherShin, Sung-Chulresearcher
Description
한국과학기술원 : 물리학과,
Publisher
한국과학기술원
Issue Date
1997
Identifier
112570/325007 / 000885314
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 물리학과, 1997.2, [ i, 81 p. ]

Keywords

ECR PECVD; 실리콘; 비정질; 미세결정; Microcrystallin; Raman; XRD; Dilution; Silicon; Amorphous

URI
http://hdl.handle.net/10203/47551
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=112570&flag=dissertation
Appears in Collection
PH-Theses_Ph.D.(박사논문)
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