ECR PECVD (Electron cyclotron resonance plasma enhanced chemical vapour deposition)로 증착한 비정질과 미세결정 실리콘의 특성연구Properties of amorphous silicon and microcrystalline silicon deposited by ECR PECVD
- Advisors
- 신성철researcher; Shin, Sung-Chulresearcher
- Description
- 한국과학기술원 : 물리학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1997
- Identifier
- 112570/325007 / 000885314
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 물리학과, 1997.2, [ i, 81 p. ]
- Keywords
ECR PECVD; 실리콘; 비정질; 미세결정; Microcrystallin; Raman; XRD; Dilution; Silicon; Amorphous
- Appears in Collection
- PH-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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