ECR PECVD (Electron cyclotron resonance plasma enhanced chemical vapour deposition)로 증착한 비정질과 미세결정 실리콘의 특성연구Properties of amorphous silicon and microcrystalline silicon deposited by ECR PECVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 신성철 | - |
| dc.contributor.advisor | Shin, Sung-Chul | - |
| dc.contributor.author | 이경언 | - |
| dc.contributor.author | Lee, Keong-Eoun | - |
| dc.date.accessioned | 2011-12-14T07:27:09Z | - |
| dc.date.available | 2011-12-14T07:27:09Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=112570&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/47551 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 물리학과, 1997.2, [ i, 81 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | ECR PECVD | - |
| dc.subject | 실리콘 | - |
| dc.subject | 비정질 | - |
| dc.subject | 미세결정 | - |
| dc.subject | Microcrystallin | - |
| dc.subject | Raman | - |
| dc.subject | XRD | - |
| dc.subject | Dilution | - |
| dc.subject | Silicon | - |
| dc.subject | Amorphous | - |
| dc.title | ECR PECVD (Electron cyclotron resonance plasma enhanced chemical vapour deposition)로 증착한 비정질과 미세결정 실리콘의 특성연구 | - |
| dc.title.alternative | Properties of amorphous silicon and microcrystalline silicon deposited by ECR PECVD | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 112570/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000885314 | - |
| dc.contributor.localauthor | 이경언 | - |
| dc.contributor.localauthor | Lee, Keong-Eoun | - |
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