DUV submicron 리소그라피를 위한 5 반사광학계의 설계와 평가 = Design and evaluation of the five mirror optical system for DUV submicron lithography

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Advisors
공홍진researcher이상수researcherKong, Hong-JinresearcherLee, Sang-Sooresearcher
Description
한국과학기술원 : 물리학과,
Publisher
한국과학기술원
Issue Date
1994
Identifier
68896/325007 / 000865298
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 물리학과, 1994.2, [ iv, 95 p. ]

URI
http://hdl.handle.net/10203/47477
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=68896&flag=dissertation
Appears in Collection
PH-Theses_Ph.D.(박사논문)
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