DUV submicron 리소그라피를 위한 5 반사광학계의 설계와 평가Design and evaluation of the five mirror optical system for DUV submicron lithography
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 공홍진 | - |
| dc.contributor.advisor | 이상수 | - |
| dc.contributor.advisor | Kong, Hong-Jin | - |
| dc.contributor.advisor | Lee, Sang-Soo | - |
| dc.contributor.author | 이동희 | - |
| dc.contributor.author | Lee, Dong-Hee | - |
| dc.date.accessioned | 2011-12-14T07:26:01Z | - |
| dc.date.available | 2011-12-14T07:26:01Z | - |
| dc.date.issued | 1994 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=68896&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/47477 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 물리학과, 1994.2, [ iv, 95 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | DUV submicron 리소그라피를 위한 5 반사광학계의 설계와 평가 | - |
| dc.title.alternative | Design and evaluation of the five mirror optical system for DUV submicron lithography | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 68896/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000865298 | - |
| dc.contributor.localauthor | 이동희 | - |
| dc.contributor.localauthor | Lee, Dong-Hee | - |
- Appears in Collection
- PH-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.