Luminescence of Si nanocluster and Er in silicon-rich silicon nitride = 실리콘 나이트라이드 안에 들어있는 실리콘 나노클러스터와 어븀의 발광특성 연구

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 390
  • Download : 0
Si-nanocluster (nc-Si) luminescence and Er$^{3+}$ luminescence in silicon-rich silicon nitride (SRSN), which consists of nc-Si embedded inside a silicon nitride matrix are investigated. First, we report on the origin of visible light emission by comparing the photoluminescence (PL) properties of SRSN with those of similarly prepared silicon-rich silicon oxide (SRSO), which consists of nc-Si embedded inside a SiO$_2$ matrix. Based on the dependence of PL intensity and peak position on the film compostion, anneal temperature and hydrogenation, we identify that visible luminescence originates from nc-Si. The results indicate that nitride passivation of nc-Si leads to increased PL energy over SRSO. Second, we further investigate the role of nitrogen passivation of nc-Si by continuously tuning the passivating dielectric from pure silicon dioxide through oxynitride to pure silicon nitride while keeping the size of nc-Si and the fabrication procedure constant. We find that the observed nonlinear variation of the nc-Si luminescence peak energy agrees well with theoretical predictions about the effect of oxygen coverage on nc-Si bandgap. Such results support that strain relief by nitride passivation results in suppressing the nc-Si bandgap reduction. Finally, we report on Er$^{3+}$ luminescence in SRSN. We find that nc-Si in Er doped SRSN can act as efficient sensitizers for Er$^{3+}$, allowing off-resonant broadband pumping of Er$^{3+}$. Comparison with a similarly prepared Er doped SRSO shows that nitride offers both more effective nc-Si sensitization and higher optical activation of Er than oxide.
Advisors
Shin, Jung-H.researcher신중훈researcher
Description
한국과학기술원 : 물리학과,
Publisher
한국과학기술원
Issue Date
2008
Identifier
295303/325007  / 020045151
Language
eng
Description

학위논문(박사) - 한국과학기술원 : 물리학과, 2008.2, [ viii, 77 p. ]

Keywords

Luminescence; Si nanocluster; Er; Silicon nitride; 발광; 실리콘 나노클러스터; 어븀; 실리콘 나이트라이드

URI
http://hdl.handle.net/10203/47435
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=295303&flag=dissertation
Appears in Collection
PH-Theses_Ph.D.(박사논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0