DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 곽병만 | - |
dc.contributor.advisor | Kwak, Byung-Man | - |
dc.contributor.author | 김일용 | - |
dc.contributor.author | Kim, Il-Yong | - |
dc.date.accessioned | 2011-12-14T06:59:00Z | - |
dc.date.available | 2011-12-14T06:59:00Z | - |
dc.date.issued | 1997 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=114417&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/46602 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 기계공학과, 1997.2, [ ix, 70 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | X-ray mask | - |
dc.subject | 변형해석 | - |
dc.subject | X-선 마스크 | - |
dc.subject | Membrane distortion | - |
dc.subject | Pattern distortion | - |
dc.subject | OPD | - |
dc.subject | IPD | - |
dc.subject | X-ray lithography | - |
dc.title | 제조공정과 사용조건을 고려한 X-선 마스크의 변형해석 | - |
dc.title.alternative | Analysis of structural distortions of an X-ray mask considering fabrication processes and writing conditions | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 114417/325007 | - |
dc.description.department | 한국과학기술원 : 기계공학과, | - |
dc.identifier.uid | 000953103 | - |
dc.contributor.localauthor | 곽병만 | - |
dc.contributor.localauthor | Kwak, Byung-Man | - |
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