DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 윤성기 | - |
dc.contributor.advisor | 조영호 | - |
dc.contributor.advisor | Youn, Sung-Kie | - |
dc.contributor.advisor | Cho, Young-Ho | - |
dc.contributor.author | 서경선 | - |
dc.contributor.author | Seo, Kyoung-Sun | - |
dc.date.accessioned | 2011-12-14T06:57:52Z | - |
dc.date.available | 2011-12-14T06:57:52Z | - |
dc.date.issued | 1996 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=105433&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/46531 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 기계공학과, 1996.2, [ v, 56 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | 수직 거울 | - |
dc.subject | 정전구동형 액츄에이터 | - |
dc.subject | 기판 가공 | - |
dc.subject | MEMS | - |
dc.subject | Micromirror | - |
dc.subject | Vertical mirror | - |
dc.subject | Electrostatic actuator | - |
dc.subject | Bulk etching | - |
dc.subject | 마이크로머신 | - |
dc.subject | 초소형 거울 | - |
dc.title | 실리콘의 이방성 식각 특성을 이용한 정전 구동형 초소형 거울의 개발 | - |
dc.title.alternative | Development of electrostatically-driven vertical micro mirrors using anisotropic silicon etching | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 105433/325007 | - |
dc.description.department | 한국과학기술원 : 기계공학과, | - |
dc.identifier.uid | 000943259 | - |
dc.contributor.localauthor | 윤성기 | - |
dc.contributor.localauthor | 조영호 | - |
dc.contributor.localauthor | Youn, Sung-Kie | - |
dc.contributor.localauthor | Cho, Young-Ho | - |
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