Threshold acceleration switch using SU-8 = SU-8을 이용한 임계 가속도계 스위치

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Micro-Electro-Mechanical System (MEMS) is a micro fabricated system that contains both electrical and mechanical components. Has ability to make seamless integration of mechanical sensors and actuators with electronic processors and controllers at chip level there are three generic and distinct merits for MEMS devices and micro fabrication technologies. MEMS technology has revolutionary sensors and actuators. Microsystem technology is the integration of micromechanical to reduce of costs, weight, and size, as well as the improvement of functionality and reliability.These are necessary to meet required specification. Inertia micro-switches, fabricated by micro electro-mechanical system (MEMS) technology, have the advantages of miniaturization and low-cost batch production they can be applied in sensing automobile for airbags, used to measure the tilt of an object, biomedical applications, consumer applications, Like camcorders active picture stabilization ,involve the robotics and machine. In this research I proposed the idea to combine silicon fabrication technology and polymer SU-8 process. By the combination of both I successfully produced the SU-8 suspended bridge structure. And apply this structure to the acceleration switch. I designed the acceleration switch for four values of acceleration ranging from 25g to 100g. This design has resulted into the robust and flexible structure having the high aspect Ratio and fabrication is very easy while the cost is low. The basic concept involves the suspended Proof mass is suspended with the help of two parallel fixed ended beams when acceleration is applied to this it makes contact with side electrodes. Two analytical methodologies have been used in order to calculate the deflection and natural frequency of the structure. In the first case the structure has been solved by assuming it as fixed-fixed end beam while in second case the structure was considered as the fixed-guided end by the proof mass. Deflection ...
Lee, Seung-S.researcher이승섭researcher
한국과학기술원 : 기계공학전공,
Issue Date
418935/325007  / 020083956

학위논문(석사) - 한국과학기술원 : 기계공학전공, 2010.2, [ xvii, 73 p. ]


Suspended Structure; SU-8; Acceleration Switch; Cantilever; 외팔보; 부유 구조물; SU-8; 가속도 스위치

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