판스프링과 보이스코일모터를 이용한 초정밀 XY 스테이지의 설계 및 특성분석The design and test of ultraprecision xy stage using leaf spring mechanism and voice-coil motor
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 권대갑 | - |
| dc.contributor.advisor | Gweon, Dae-Gab | - |
| dc.contributor.author | 강동우 | - |
| dc.contributor.author | Kang, Dong-Woo | - |
| dc.date.accessioned | 2011-12-14T06:40:33Z | - |
| dc.date.available | 2011-12-14T06:40:33Z | - |
| dc.date.issued | 2003 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=180131&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/45438 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 기계공학전공, 2003.2, [ viii, 92 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 스테이지 | - |
| dc.subject | 초정밀 | - |
| dc.subject | 보이스코일모터 | - |
| dc.subject | 판스프링 | - |
| dc.subject | 나노기술 | - |
| dc.subject | nanotechnology | - |
| dc.subject | stage | - |
| dc.subject | precision | - |
| dc.subject | voice-coil motor | - |
| dc.subject | leaf spring | - |
| dc.title | 판스프링과 보이스코일모터를 이용한 초정밀 XY 스테이지의 설계 및 특성분석 | - |
| dc.title.alternative | The design and test of ultraprecision xy stage using leaf spring mechanism and voice-coil motor | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 180131/325007 | - |
| dc.description.department | 한국과학기술원 : 기계공학전공, | - |
| dc.identifier.uid | 020013002 | - |
| dc.contributor.localauthor | 강동우 | - |
| dc.contributor.localauthor | Kang, Dong-Woo | - |
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- ME-Theses_Master(석사논문)
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