광간섭과 공초점 원리를 이용한 3차원 표면형상 정밀 측정에 관한 연구 = 3D surface profile precision measurement by using optical interferometry and confocal microscopy

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Advisors
권대갑researcherGweon, Dae-Gabresearcher
Description
한국과학기술원 : 기계공학전공,
Publisher
한국과학기술원
Issue Date
2003
Identifier
180086/325007 / 020013667
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학전공, 2003.2, [ v, 72 p. ]

Keywords

형상; 공초점; 간섭; 표면; 측정; Measurement; Profile; Confocal; Interferometry; Surface

URI
http://hdl.handle.net/10203/45393
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=180086&flag=dissertation
Appears in Collection
ME-Theses_Master(석사논문)
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