Piezoelectrically driven single- and dual-axis rotational micromirrors for large angular motion = 회전각 증대를 위한 압전 구동형 회전 미소거울의 설계,제작 및 시험

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This thesis investigates PZT actuated micromirror switches for optical cross connect applications. The present design uses torsional micromirrors detached from PZT actuator to eliminate bending, tension, and torsion at the joint of the micromirrors and the PZT actuators. We consider two types of micromirrors: the conventional tiling micromirror attached to the PZT actuator (TMA) and the proposed torsional micromirror detached from the PZT actuator (TMD). The TMD is extended to dual-axis optical switch applications. In the experimental study, the static rotational angles of TMD are measured as 6.1° in +x-axis and 5.8° in -x-axis at 16V DC. On the other hand, rotational angles of TMA are 0.9° in +x-axis and 0.8° in -x-axis at 16V DC. The rotational angle of TMD is 6 times larger than that of TMA. However, the rotational response curve of TMD shows hysteresis due to the static friction between the micromirror and the PZT actuator. We have shown that 65.5% of the hysteresis is due to the static friction caused by the initial preload of the PZT actuator. In case of dual-axis TMD, the rotational angles are measured as 5.5° in +x-axis, 5.4° in -x-axis, 4.7° in +y-axis and 5.0° in -y-axis at 16V DC. From the dynamic test of TMD, the single-axis TMD shows the time constant of 0.80 ms. The dual-axis TMD shows the time constant of 1.96 ms in x-axis and 1.52 ms in y-axis, respectively. The dual-axis TMD shows stable operation without severe wear for 21.6 million cycles driven by 16 $V_{p-p}$ sinusoidal wave signal at room temperature. We experimentally prove that the large angular motion of TMD has been achieved by detaching the PZT actuator from the micromirror, showing potential for optical cross connect applications.
Cho, Young-Horesearcher조영호researcher
한국과학기술원 : 기계공학전공,
Issue Date
173871/325007 / 020003086

학위논문(석사) - 한국과학기술원 : 기계공학전공, 2002.2, [ xiii, 92 p. ]


rotation; micromirror; actuation; piezoelectric; switch; 광스위치; 구동; 회전각; 미소거울; 압전

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