파장 주사 간섭계를 이용한 불연속면을 갖는 물체의 표면 형상 측정Discontinuous surface profile measurement using wavelength scanning interferometry

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Advisors
조형석researcherCho, Hyung-Suckresearcher
Description
한국과학기술원 : 기계공학전공,
Publisher
한국과학기술원
Issue Date
2001
Identifier
169408/325007 / 000993013
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학전공, 2001.8, [ v, 93 p ]

Keywords

파장주사간섭계; 3차원 측정; 단차 높이 측정; step height measurement; wavelength scanning interferomety; 3D measurement

URI
http://hdl.handle.net/10203/45279
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=169408&flag=dissertation
Appears in Collection
ME-Theses_Master(석사논문)
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