학위논문(석사) - 한국과학기술원 : 기계공학과, 1999.2, [ ix, 64 p. ]
Microactuator; Electromagnetic; MEMS; Planar coil; 방사형 자기장; 평면코일; 마이크로 액추에이터; 전자기형; Radial magnetic field
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