Browse "EE-Journal Papers(저널논문)" by Subject Rapid thermal annealing
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| Application of Pulsed Green Laser Activation to Top-Tier MOSFET Fabrication for Monolithic 3-D Integration Park, Youngkeun; Jeong, Jaejoong; Noh, Semin; Kim, Heetae; Kim, Seongho; Kim, Kiryong; Kim, Dongbin; et al, IEEE TRANSACTIONS ON ELECTRON DEVICES, v.71, no.1, pp.890 - 895, 2024-01 |
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