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Crystallized HfLaO embedded tetragonal ZrO2 for dynamic random access memory capacitor dielectrics Shin, Yunsang; Min, Kyung Kyu; Lee, Seok-Hee; Lim, Sung Kyu; Oh, Jae Sub; Lee, Kee-Jeung; Hong, Kwon; et al, APPLIED PHYSICS LETTERS, v.98, no.17, 2011-04 |
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