AFM scanner용 초정밀 XYZ 스테이지의 설계, 특성분석 및 제어에 관한 연구 = A precision XYZ-stage for AFM scanner design, analysis and control

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dc.contributor.advisor권대갑-
dc.contributor.advisorGweon, Dae-Gab-
dc.contributor.author심종엽-
dc.contributor.authorShim, Jong-Youp-
dc.date.accessioned2011-12-14T06:32:59Z-
dc.date.available2011-12-14T06:32:59Z-
dc.date.issued1998-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=133424&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/44978-
dc.description학위논문(석사) - 한국과학기술원 : 기계공학과, 1998.2, [ vii, 63 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subject최적설계-
dc.subject압전소자-
dc.subject원자현미경-
dc.subject초정밀 3축 스테이지-
dc.subjectPID제어-
dc.subjectPID feedback controller-
dc.subjectOptimal design-
dc.subjectPZT-
dc.subjectAFM-
dc.subjectPrecision XYZ-stage-
dc.titleAFM scanner용 초정밀 XYZ 스테이지의 설계, 특성분석 및 제어에 관한 연구 = A precision XYZ-stage for AFM scanner design, analysis and control-
dc.typeThesis(Master)-
dc.identifier.CNRN133424/325007-
dc.description.department한국과학기술원 : 기계공학과, -
dc.identifier.uid000963342-
dc.contributor.localauthor권대갑-
dc.contributor.localauthorGweon, Dae-Gab-
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