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Selective Pore-Sealing of Highly Porous Ultralow-k dielectrics for ULSI Interconnects by Cyclic Initiated Chemical Vapor Deposition Process

Yoon, Seong Jun; Pak, Kwanyong; Ahn, Hyun Jun; Yoon, Alexander; Im, Sung Gap; Cho, Byung Jin, 38th IEEE Symposium on VLSI Technology, pp.73 - 74, IEEE, 2018-06

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