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Improvement of the Quality of GaAs Films on Fluorides Using Electron-Beam Exposure Epitaxy(EBE-Epitaxy) Lee, Hee Chul; Kanemaru, S; Ishiwara, H; Furukawa, S, Proc. 18th symp. on Ion Implantation and Submicron Fabrication, Saitama Japen, pp.37 - 40, 1987 |
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