DSpace at KOASAS: Improvement of the Quality of GaAs Films on Fluorides Using Electron-Beam Exposure Epitaxy(EBE-Epitaxy)

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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Improvement of the Quality of GaAs Films on Fluorides Using Electron-Beam Exposure Epitaxy(EBE-Epitaxy)

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Lee, Hee Chul researcher / Kanemaru, S / Ishiwara, H / Furukawa, S

Issue Date: 1987

Language: ENG

Citation: Proc. 18th symp. on Ion Implantation and Submicron Fabrication, Saitama Japen, pp.37 - 40

URI: http://hdl.handle.net/10203/113256

Appears in Collection: EE-Conference Papers(학술회의논문)

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