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Nanoelectromechanical (NEM) relays integrated with CMOS SRAM for improved stability and low leakage Chong, S.; Akarvardar, K.; Parsa, R.; Yoon, Jun-Bo; Howe, R.T.; Mitra, S.; Wong, H.-S.P., 2009 IEEE/ACM International Conference on Computer-Aided Design, ICCAD 2009, pp.478 - 484, 2009-11-02 |
Titanium nitride sidewall stringer process for lateral nanoelectromechanical relays Lee, D.; Lee, W.S.; Provin, e J.; Lee, J.-O.; Yoon, Jun-Bo; Howe, R.T.; Mitra, S.; et al, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, pp.456 - 459, IEEE, 2010-01-24 |
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