이온 주입된 산소가 실리콘 박막의 결정화와 Polysilicon TFT에 미치는 영향Effects of implanted oxygen on the crystallization of silicon films and polysilicon TFT characteristics
- Advisors
- 김충기; Kim, Choong-Ki
- Description
- 한국과학기술원 : 전기 및 전자공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1993
- Identifier
- 68699/325007 / 000911441
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전기 및 전자공학과, 1993.2, [ 50, [2] p. ]
- Appears in Collection
- EE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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