이온 주입된 산소가 실리콘 박막의 결정화와 Polysilicon TFT에 미치는 영향Effects of implanted oxygen on the crystallization of silicon films and polysilicon TFT characteristics
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김충기 | - |
| dc.contributor.advisor | Kim, Choong-Ki | - |
| dc.contributor.author | 이성훈 | - |
| dc.contributor.author | Lee, Seong-Hoon | - |
| dc.date.accessioned | 2011-12-14T01:58:43Z | - |
| dc.date.available | 2011-12-14T01:58:43Z | - |
| dc.date.issued | 1993 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=68699&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/38115 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전기 및 전자공학과, 1993.2, [ 50, [2] p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 이온 주입된 산소가 실리콘 박막의 결정화와 Polysilicon TFT에 미치는 영향 | - |
| dc.title.alternative | Effects of implanted oxygen on the crystallization of silicon films and polysilicon TFT characteristics | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 68699/325007 | - |
| dc.description.department | 한국과학기술원 : 전기 및 전자공학과, | - |
| dc.identifier.uid | 000911441 | - |
| dc.contributor.localauthor | 김충기 | - |
| dc.contributor.localauthor | Kim, Choong-Ki | - |
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