Hydrizoalane 의 합성 및 단일 전구체 OMCVD 법에 의한 AlN 박막의 제조Synthesis of hydrizoalanes and preparation of AlN thin films by single-precursor OMCVD
- Advisors
- 박준택researcher; Park, Joon-Taikresearcher
- Description
- 한국과학기술원 : 화학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1996
- Identifier
- 105585/325007 / 000943116
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 화학과, 1996.2, [ vi, 47 p. ]
- Keywords
화학 증착법; 박막; 단일 전구체; 히드리조알란; Hydrizoalane; OMCVD; Single-Precursor; Thin Film; AlN
- Appears in Collection
- CH-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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