Hydrizoalane 의 합성 및 단일 전구체 OMCVD 법에 의한 AlN 박막의 제조Synthesis of hydrizoalanes and preparation of AlN thin films by single-precursor OMCVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박준택 | - |
| dc.contributor.advisor | Park, Joon-Taik | - |
| dc.contributor.author | 김재환 | - |
| dc.contributor.author | Kim, Jae-Hwan | - |
| dc.date.accessioned | 2011-12-13T05:00:49Z | - |
| dc.date.available | 2011-12-13T05:00:49Z | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=105585&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/32729 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 화학과, 1996.2, [ vi, 47 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 화학 증착법 | - |
| dc.subject | 박막 | - |
| dc.subject | 단일 전구체 | - |
| dc.subject | 히드리조알란 | - |
| dc.subject | Hydrizoalane | - |
| dc.subject | OMCVD | - |
| dc.subject | Single-Precursor | - |
| dc.subject | Thin Film | - |
| dc.subject | AlN | - |
| dc.title | Hydrizoalane 의 합성 및 단일 전구체 OMCVD 법에 의한 AlN 박막의 제조 | - |
| dc.title.alternative | Synthesis of hydrizoalanes and preparation of AlN thin films by single-precursor OMCVD | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 105585/325007 | - |
| dc.description.department | 한국과학기술원 : 화학과, | - |
| dc.identifier.uid | 000943116 | - |
| dc.contributor.localauthor | 박준택 | - |
| dc.contributor.localauthor | Park, Joon-Taik | - |
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