학위논문(석사) - 한국과학기술원 : 기계공학과, 2023.8,[iv, 44 p. :]
Third harmonic generation▼aSilicon wafer▼aPrecision metrology▼aOptical inspection▼aDepth-resolved measurement; 삼차조화파▼a실리콘 웨이퍼▼a정밀측정▼a광학 검사▼a두께 분해형 측정
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