Al, Ga) 와 dialkylhydrazone 의 반응 및 MOCVD 법에 의한 AlN 박막의 제조$MMe_3$ (M
- Advisors
- 박준택researcher; Park, Joon-Taikresearcher
- Description
- 한국과학기술원 : 화학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2001
- Identifier
- 165491/325007 / 000993236
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 화학과, 2001.2, [ v, 39 p. ]
- Keywords
AlN 박막; 선구물질; single source precursor; AlN thinfilm
- Appears in Collection
- CH-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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