Al, Ga) 와 dialkylhydrazone 의 반응 및 MOCVD 법에 의한 AlN 박막의 제조$MMe_3$ (M
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박준택 | - |
| dc.contributor.advisor | Park, Joon-Taik | - |
| dc.contributor.author | 박정원 | - |
| dc.contributor.author | Park, Joung-Won | - |
| dc.date.accessioned | 2011-12-13T04:48:01Z | - |
| dc.date.available | 2011-12-13T04:48:01Z | - |
| dc.date.issued | 2001 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=165491&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/31874 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 화학과, 2001.2, [ v, 39 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | AlN 박막 | - |
| dc.subject | 선구물질 | - |
| dc.subject | single source precursor | - |
| dc.subject | AlN thinfilm | - |
| dc.title | Al, Ga) 와 dialkylhydrazone 의 반응 및 MOCVD 법에 의한 AlN 박막의 제조 | - |
| dc.title.alternative | $MMe_3$ (M | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 165491/325007 | - |
| dc.description.department | 한국과학기술원 : 화학과, | - |
| dc.identifier.uid | 000993236 | - |
| dc.contributor.localauthor | 박준택 | - |
| dc.contributor.localauthor | Park, Joon-Taik | - |
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