DSpace at KOASAS: Characterization of Vat Photopolymerization Additively Manufactured CMP Pads

DSpace at KOASAS

College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Characterization of Vat Photopolymerization Additively Manufactured CMP Pads

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Kim, Dong Geun / Kim, Sanha researcher

Publisher: International Conference on Planarization Technology (ICPT)

Issue Date: 2023-11-01

Language: English

Citation: International Conference on Planarization/CMP Technology, ICPT 2023

URI: http://hdl.handle.net/10203/317313

Appears in Collection: ME-Conference Papers(학술회의논문)

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