Density Multiplication of Sub 5 nm Supramolecular Dendrimer Patterns on Block Copolymer Assisted High Resolution Trenches
- Publisher
- KAIST
- Issue Date
- 2022-10-21
- Language
- English
- Citation
6th International Symposium on Directed Self-Assembly (DSA 2022)
- Appears in Collection
- CBE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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