Density Multiplication of Sub 5 nm Supramolecular Dendrimer Patterns on Block Copolymer Assisted High Resolution Trenches
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, Heejin | ko |
| dc.contributor.author | Lee, Juhwan | ko |
| dc.contributor.author | Lee, Wonmoo | ko |
| dc.contributor.author | Jung, Hee-Tae | ko |
| dc.date.accessioned | 2024-01-02T02:03:38Z | - |
| dc.date.available | 2024-01-02T02:03:38Z | - |
| dc.date.created | 2023-12-27 | - |
| dc.date.issued | 2022-10-21 | - |
| dc.identifier.citation | 6th International Symposium on Directed Self-Assembly (DSA 2022) | - |
| dc.identifier.uri | http://hdl.handle.net/10203/317144 | - |
| dc.language | English | - |
| dc.publisher | KAIST | - |
| dc.title | Density Multiplication of Sub 5 nm Supramolecular Dendrimer Patterns on Block Copolymer Assisted High Resolution Trenches | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 6th International Symposium on Directed Self-Assembly (DSA 2022) | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | KAIST, Daejeon | - |
| dc.contributor.localauthor | Jung, Hee-Tae | - |
| dc.contributor.nonIdAuthor | Park, Heejin | - |
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