Role of Inter-Layer Dielectric on the Electrical and Heat Dissipation Characteristics in the Heterogeneous 3D Sequential CFETs with Ge pFETs on Si nFETs
- Issue Date
- 2023-12-11
- Language
- English
- Citation
2023 International Electron Devices Meeting (IEDM)
- ISSN
- 0163-1918
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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