학위논문(석사) - 한국과학기술원 : 전기및전자공학부, 2023.2,[v, 36 p. :]
Hafnium zirconium oxide▼aThick films▼aHigh dielectric constant▼aMorphotropic phase boundary▼aMFM capacitors; HfxZr1-xO2▼a후막▼a고유전율▼a모포트로픽 위상 경계▼aMFM 커패시터
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