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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Development of Nanoimprinting and Maskless Lithography System and Process withImproved Patterning Quality for Advanced Packaging

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Lee, Wonsup / Lim, Hyungjun / Cho, Hyunmin / Kim, Geehong / Choi, Jinsu / Yoo, Hongkiresearcher / Chang, WonSeok
Publisher
The Korean Microelectronics and Packaging Society
Issue Date
2022-11-10
Language
English
Citation

The 20th International Symposium on Microelectronics and Packaging, ISMP 2022

URI
http://hdl.handle.net/10203/304839
Appears in Collection
ME-Conference Papers(학술회의논문)
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