DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Wonsup | ko |
dc.contributor.author | Lim, Hyungjun | ko |
dc.contributor.author | Cho, Hyunmin | ko |
dc.contributor.author | Kim, Geehong | ko |
dc.contributor.author | Choi, Jinsu | ko |
dc.contributor.author | Yoo, Hongki | ko |
dc.contributor.author | Chang, WonSeok | ko |
dc.date.accessioned | 2023-01-31T07:02:50Z | - |
dc.date.available | 2023-01-31T07:02:50Z | - |
dc.date.created | 2023-01-09 | - |
dc.date.issued | 2022-11-10 | - |
dc.identifier.citation | The 20th International Symposium on Microelectronics and Packaging, ISMP 2022 | - |
dc.identifier.uri | http://hdl.handle.net/10203/304839 | - |
dc.language | English | - |
dc.publisher | The Korean Microelectronics and Packaging Society | - |
dc.title | Development of Nanoimprinting and Maskless Lithography System and Process withImproved Patterning Quality for Advanced Packaging | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | The 20th International Symposium on Microelectronics and Packaging, ISMP 2022 | - |
dc.identifier.conferencecountry | KO | - |
dc.identifier.conferencelocation | Hanwha Resorts, Busan | - |
dc.contributor.localauthor | Yoo, Hongki | - |
dc.contributor.nonIdAuthor | Lee, Wonsup | - |
dc.contributor.nonIdAuthor | Lim, Hyungjun | - |
dc.contributor.nonIdAuthor | Cho, Hyunmin | - |
dc.contributor.nonIdAuthor | Kim, Geehong | - |
dc.contributor.nonIdAuthor | Choi, Jinsu | - |
dc.contributor.nonIdAuthor | Chang, WonSeok | - |
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