Development of Nanoimprinting and Maskless Lithography System and Process withImproved Patterning Quality for Advanced Packaging

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dc.contributor.authorLee, Wonsupko
dc.contributor.authorLim, Hyungjunko
dc.contributor.authorCho, Hyunminko
dc.contributor.authorKim, Geehongko
dc.contributor.authorChoi, Jinsuko
dc.contributor.authorYoo, Hongkiko
dc.contributor.authorChang, WonSeokko
dc.date.accessioned2023-01-31T07:02:50Z-
dc.date.available2023-01-31T07:02:50Z-
dc.date.created2023-01-09-
dc.date.issued2022-11-10-
dc.identifier.citationThe 20th International Symposium on Microelectronics and Packaging, ISMP 2022-
dc.identifier.urihttp://hdl.handle.net/10203/304839-
dc.languageEnglish-
dc.publisherThe Korean Microelectronics and Packaging Society-
dc.titleDevelopment of Nanoimprinting and Maskless Lithography System and Process withImproved Patterning Quality for Advanced Packaging-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameThe 20th International Symposium on Microelectronics and Packaging, ISMP 2022-
dc.identifier.conferencecountryKO-
dc.identifier.conferencelocationHanwha Resorts, Busan-
dc.contributor.localauthorYoo, Hongki-
dc.contributor.nonIdAuthorLee, Wonsup-
dc.contributor.nonIdAuthorLim, Hyungjun-
dc.contributor.nonIdAuthorCho, Hyunmin-
dc.contributor.nonIdAuthorKim, Geehong-
dc.contributor.nonIdAuthorChoi, Jinsu-
dc.contributor.nonIdAuthorChang, WonSeok-
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ME-Conference Papers(학술회의논문)
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