Method for manufacturing a carbon nanotube multilayer pattern using photolithography and dry etching포토리쏘그래피법과 드라이 에칭법을 이용한 탄소나노튜브 다층막 패턴의 제조방법
- Assignee
- KAIST
- Country
- CC (Cocos (Keeling) Islands)
- Application Date
- 2004-10-25
- Application Number
- 200410085905.X
- Registration Date
- 2009-07-29
- Registration Number
- 100520586
- Appears in Collection
- CBE-Patent(특허)
- Files in This Item
- There are no files associated with this item.
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