Surface acoustic wave filter employing A1N/A1N:H/A1N tri-layered film and a process for fabricating the sameA1N/A1N:H/A1N 3층 필름을 사용하는 표면 음향파 필터와 동일한 것을 제조하기 위한 공정
The present invention provides a novel surface acoustic wave (SAW) filter having a high propagation velocity and electromechanical coupling coefficient (k.sup.2) employing A1N/A1N:H/A1N tri-layered film where both sides of A1N:H film are deposited with A1N film to protect the film from vapor, and a process for fabricating the same.
- Assignee
- KAIST
- Country
- US (United States)
- Application Date
- 1997-12-29
- Application Number
- 08999022
- Registration Date
- 2000-08-08
- Registration Number
- 06099700
- Appears in Collection
- RIMS Patents
- Files in This Item
- There are no files associated with this item.
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