Surface acoustic wave filter employing A1N/A1N:H/A1N tri-layered film and a process for fabricating the sameA1N/A1N:H/A1N 3층 필름을 사용하는 표면 음향파 필터와 동일한 것을 제조하기 위한 공정
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Jai-Young | ko |
| dc.contributor.author | Kim, Yoon-Kee | ko |
| dc.contributor.author | Yong, Yoon-Jung | ko |
| dc.contributor.author | Han, Young-Soo | ko |
| dc.date.accessioned | 2022-12-12T09:00:44Z | - |
| dc.date.available | 2022-12-12T09:00:44Z | - |
| dc.identifier.uri | http://hdl.handle.net/10203/302867 | - |
| dc.description.abstract | The present invention provides a novel surface acoustic wave (SAW) filter having a high propagation velocity and electromechanical coupling coefficient (k.sup.2) employing A1N/A1N:H/A1N tri-layered film where both sides of A1N:H film are deposited with A1N film to protect the film from vapor, and a process for fabricating the same. | - |
| dc.title | Surface acoustic wave filter employing A1N/A1N:H/A1N tri-layered film and a process for fabricating the same | - |
| dc.title.alternative | A1N/A1N:H/A1N 3층 필름을 사용하는 표면 음향파 필터와 동일한 것을 제조하기 위한 공정 | - |
| dc.type | Patent | - |
| dc.type.rims | PAT | - |
| dc.contributor.nonIdAuthor | Kim, Yoon-Kee | - |
| dc.contributor.nonIdAuthor | Yong, Yoon-Jung | - |
| dc.contributor.nonIdAuthor | Han, Young-Soo | - |
| dc.contributor.assignee | KAIST | - |
| dc.identifier.iprsType | 특허 | - |
| dc.identifier.patentApplicationNumber | 08999022 | - |
| dc.identifier.patentRegistrationNumber | 06099700 | - |
| dc.date.application | 1997-12-29 | - |
| dc.date.registration | 2000-08-08 | - |
| dc.publisher.country | US | - |
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