TIN의플라즈마화학증착방법PLASMA CVD METHOD FOR TiN THIN FILM
내용 없음
- Assignee
- 한국과학기술원
- Country
- KO (South Korea)
- Application Date
- 1990-03-22
- Application Number
- 10-1990-0003896
- Registration Date
- 1992-07-09
- Registration Number
- 10-0052953-0000
- Appears in Collection
- RIMS Patents
- Files in This Item
- There are no files associated with this item.
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