TIN의플라즈마화학증착방법PLASMA CVD METHOD FOR TiN THIN FILM
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 천성순 | ko |
| dc.contributor.author | 김시범 | ko |
| dc.contributor.author | 장동훈 | ko |
| dc.date.accessioned | 2022-11-18T05:03:52Z | - |
| dc.date.available | 2022-11-18T05:03:52Z | - |
| dc.identifier.uri | http://hdl.handle.net/10203/299999 | - |
| dc.description.abstract | 내용 없음 | - |
| dc.title | TIN의플라즈마화학증착방법 | - |
| dc.title.alternative | PLASMA CVD METHOD FOR TiN THIN FILM | - |
| dc.type | Patent | - |
| dc.type.rims | PAT | - |
| dc.contributor.localauthor | 천성순 | - |
| dc.contributor.nonIdAuthor | 김시범 | - |
| dc.contributor.nonIdAuthor | 장동훈 | - |
| dc.contributor.assignee | 한국과학기술원 | - |
| dc.identifier.iprsType | 특허 | - |
| dc.identifier.patentApplicationNumber | 10-1990-0003896 | - |
| dc.identifier.patentRegistrationNumber | 10-0052953-0000 | - |
| dc.date.application | 1990-03-22 | - |
| dc.date.registration | 1992-07-09 | - |
| dc.publisher.country | KO | - |
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