DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Kwang-Heum | ko |
dc.contributor.author | Lee, Seung Hee | ko |
dc.contributor.author | Cho, Sang-Joon | ko |
dc.contributor.author | Hwang, Chi-Sun | ko |
dc.contributor.author | Park, Sang-Hee Ko | ko |
dc.date.accessioned | 2022-02-08T06:46:06Z | - |
dc.date.available | 2022-02-08T06:46:06Z | - |
dc.date.created | 2022-02-08 | - |
dc.date.created | 2022-02-08 | - |
dc.date.created | 2022-02-08 | - |
dc.date.created | 2022-02-08 | - |
dc.date.issued | 2022-01 | - |
dc.identifier.citation | MICROELECTRONIC ENGINEERING, v.253 | - |
dc.identifier.issn | 0167-9317 | - |
dc.identifier.uri | http://hdl.handle.net/10203/292143 | - |
dc.description.abstract | This paper reports the effect of the properties of a back-channel region of a vertical thin-film transistor (VTFT) on its electrical performance. The deposition of a thin layer of SiO2 on a damaged back-channel region was found to improve the subthreshold swing (SS) from 0.25 to 0.12 V/dec, while maintaining the field-effect mobility. Detailed analysis of the surface morphology of the back-channel region revealed that the application of advanced photolithography resulted in a significantly smoother back-channel interface, yielding higher-performing VTFTs. The VTFT fabricated using a high-resolution, stepper photolithography system exhibited a linear mobility (mu(lin)) of 14.60 cm(2)/Vs, a saturation mobility (mu(sat)) of 23.69 cm(2)/Vs, and an SS value of 0.13 V/dec. Meanwhile, the VTFT fabricated using a standard projection aligner displayed mu lin, mu sat, and SS values of 5.74 cm(2)/V.s, 13.87 cm(2)/V.s, and 0.27 V/dec, respectively. These results revealed the electrical performance of the VTFT to be strongly influenced by the properties of the back-channel region. | - |
dc.language | English | - |
dc.publisher | ELSEVIER | - |
dc.title | Improving the electrical performance of vertical thin-film transistor by engineering its back-channel interface | - |
dc.type | Article | - |
dc.identifier.wosid | 000745989000005 | - |
dc.identifier.scopusid | 2-s2.0-85120857608 | - |
dc.type.rims | ART | - |
dc.citation.volume | 253 | - |
dc.citation.publicationname | MICROELECTRONIC ENGINEERING | - |
dc.identifier.doi | 10.1016/j.mee.2021.111676 | - |
dc.contributor.localauthor | Park, Sang-Hee Ko | - |
dc.contributor.nonIdAuthor | Cho, Sang-Joon | - |
dc.contributor.nonIdAuthor | Hwang, Chi-Sun | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Oxide semiconductor | - |
dc.subject.keywordAuthor | Vertical thin-film transistor | - |
dc.subject.keywordAuthor | Back-channel | - |
dc.subject.keywordAuthor | Surface morphology | - |
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