Semiconductor type gas sensor array based on porous nanofilm by Glancing Angle Deposition

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Publisher
마이크로나노시스템학회
Issue Date
2020-08-19
Language
Korean
Citation

마이크로 나노 시스템학회 (KMEMS) 2020

URI
http://hdl.handle.net/10203/290070
Appears in Collection
ME-Conference Papers(학술회의논문)
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