DC Field | Value | Language |
---|---|---|
dc.contributor.author | 강민구 | ko |
dc.contributor.author | 조인철 | ko |
dc.contributor.author | 박인규 | ko |
dc.date.accessioned | 2021-12-06T06:48:24Z | - |
dc.date.available | 2021-12-06T06:48:24Z | - |
dc.date.created | 2021-12-02 | - |
dc.date.issued | 2020-08-19 | - |
dc.identifier.citation | 마이크로 나노 시스템학회 (KMEMS) 2020 | - |
dc.identifier.uri | http://hdl.handle.net/10203/290070 | - |
dc.language | Korean | - |
dc.publisher | 마이크로나노시스템학회 | - |
dc.title | Semiconductor type gas sensor array based on porous nanofilm by Glancing Angle Deposition | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | 마이크로 나노 시스템학회 (KMEMS) 2020 | - |
dc.identifier.conferencecountry | KO | - |
dc.identifier.conferencelocation | 평창 휘닉스 파크 | - |
dc.contributor.localauthor | 박인규 | - |
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