학위논문(박사) - 한국과학기술원 : 생명화학공학과, 2005.2, [ viii, 110 p. ]
soft-lithography; photonic crystals; interference pattern; Holographic lithography; chemical vapor deposition; 화학기상증착; 연성식각; 광결정; 간섭 무늬; 홀로그래피 식각
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