학위논문(석사) - 한국과학기술원 : 전기및전자공학부, 2020.8,[iv, 41 p. :]
MEMS Switch▼aPower Gating technique▼aAdhesion force▼astiction▼aContact Leakage current▼aToggle mechanism; MEMS 스위치▼a토글 방식▼aPower Gating 기술▼a점착력▼a점착현상
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