DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Yoon, Jun-Bo | - |
dc.contributor.advisor | 윤준보 | - |
dc.contributor.author | Min, Hyun-Woo | - |
dc.date.accessioned | 2021-05-13T19:39:22Z | - |
dc.date.available | 2021-05-13T19:39:22Z | - |
dc.date.issued | 2020 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=925223&flag=dissertation | en_US |
dc.identifier.uri | http://hdl.handle.net/10203/285059 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 전기및전자공학부, 2020.8,[iv, 41 p. :] | - |
dc.description.abstract | In the modern era, the development of semiconductors is progressing toward miniaturization and high integration, and along with that, the leakage power is increasing significantly, so the importance of technologies for reducing leakage power is increasing as semiconductor technology develops. As a power gating switch suitable for power gating technology, which is a technology for reducing leakage power in integrated circuits, there are requirements for low driving voltage, low on resistance, and low leakage current, and MEMS switch suitable for these characteristics is to be applied to power gating technology. In this study, we proposed a special structure and operation principle to overcome the stiction in order to develop a MEMS switch that has a very low driving voltage and a low on resistance by using a toggle mechanism. In addition, the feasibility of implementation was confirmed through the appropriate design and simulation, and the device was manufactured through the appropriate process, and the proposed method of driving the device was verified through performance evaluation. | - |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | MEMS Switch▼aPower Gating technique▼aAdhesion force▼astiction▼aContact Leakage current▼aToggle mechanism | - |
dc.subject | MEMS 스위치▼a토글 방식▼aPower Gating 기술▼a점착력▼a점착현상 | - |
dc.title | Low actuation voltage toggle MEMS switch for power gating application | - |
dc.title.alternative | Power gating application 을 위한 저전압 구동 toggle MEMS switch 개발 | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 325007 | - |
dc.description.department | 한국과학기술원 :전기및전자공학부, | - |
dc.contributor.alternativeauthor | 민현우 | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.